Simultaneous Measurement of SNDM and AFM

It is very useful to measure the polarization distribution and topography simulaneously.

We developed AFM(AFM : Atomic Force Microscope, AFM can measure the topography with nanometer resolution.)-SNDM system for the simultaous measurement of SNDM and AFM.

We use the electro-conductive cantilever for the probe neddle.

Using the existing AFM system (2ch mode), we can obtain the SNDM and AFM signals at the same time.

Simultaneous measurement result of PZT thin film

PZT which is a typical piezo-electric material was measured.It can be confirmed that surface shape and polarization distribution are able to be measured simultaneously.